For more than 35 years, the engineers at Helios Technologies have provided advanced flow control solutions to the demanding semiconductor market. Today, our products are instrumental in improving yields and increasing productivity by providing accurate, reliable gas flow delivery and control in advanced semiconductor manufacturing processes. Our mass flow controllers and mass flow meters have proven field performance in virtually every gas-based wafer production process, including diffusion, oxidation, epitaxy, CVD, plasma sputtering and ion implantation.
Solid Oxide Fuel Cells
Solid oxide fuel cells (SOFCs) are being developed for a wide variety of applications because of their high efficiency over a wide range of power levels. Because precise gas control vastly improves the efficiency of energy output and resource consumption of these fuel systems, Helios Technologies has addressed the common gas control-related concerns of SOFC system manufacturers in the design of our mass flow controllers. Additionally, our mass flow controllers are used in many SOFC test stand applications for the control and calibration of gases such as hydrogen and methane in testing procedures.
Mass flow controllers engineered by Helios Technologies are currently being used throughout the photovoltaic manufacturing process. Priced to fit the economic and production needs of the photovoltaic manufacturing sector, Helios Technologies provides a full range of mass flow controllers that are ideal for solar panel manufacturing. Mass flow controllers specifically well suited to PV manufacturing include the CS200 digital MFC, CS200 HT digital MFC for high temperature environments, and our cost-efficient D07-23 MFC/MFM for medium flow gas processes.
Petrochemical, Pharmaceutical and Other Industrial Applications
We offer a full range of mass flow controllers designed to meet your standard or custom specifications. Please visit our products page or contact Helios Technologies for application support. Our knowledgeable and responsive flow experts have application experience in virtually every industry and can recommend the ideal flow control solution for your application.