Elastomer-Sealed Mass Flow Controller/Meter - High Flow
The D07-60 mass flow controller/meter delivers high accuracy independent of pressure or temperature fluctuations and is designed for mass flow control applications covering the range from 300 slm to 2000 slm. It is especially well suited for the measurement and control of process gas
in such semiconductor manufacturing applications as diffusion, oxidation, epitaxy, CVD, plasma sputtering and ion implantation.
The D07-60 MFC/MFM operates at a variety of pressures and provides a high degree of reliability, ensuring repeatable low-drift performance over time. It offers soft-start, tightly controlled response and maximum application flexibility.